US PATENT SUBCLASS 438 / FOR 151
.~.~ Neutron, gamma ray or electron beam (437/17)

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 149  DF  INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7}
FOR 150  DF  .~ Using energy beam to introduce dopant or modify dopant distribution (437/ 16) {5}
FOR 151.~.~ Neutron, gamma ray or electron beam (437/17)

DEFINITION

Classification: 438/FOR.151

Neutron, gamma ray or electron beam:

Foreign art collection for processes involving the use of beamed energy in the form of neutrons, gamma rays or electrons.