US PATENT SUBCLASS 438 / 951
.~.~ Lift-off
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
942
DF
MASKING
{6}
948
DF
.~ Radiation resist {4}
951
.~.~ Lift-off
DEFINITION
Classification: 438/951
Lift-off
Art collection under 948 involving the selective removal of a deposited layer by striping off the radiation resist and portions of the deposited layer residing thereupon.