US PATENT SUBCLASS 438 / 950
.~.~ Multilayer mask including nonradiation sensitive layer

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

942  DF  MASKING {6}
948  DF  .~ Radiation resist {4}
950.~.~ Multilayer mask including nonradiation sensitive layer

DEFINITION

Classification: 438/950

Multilayer mask including nonradiation sensitive layer:

Art collection under 948 involving the use of a multilayer mask having both radiation sensitive and nonradiation sensitive components.