438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
57 | DF | .~ Responsive to electromagnetic radiation {22} |
93 | DF | .~.~ Compound semiconductor {2} |
95 | .~.~.~ Chalcogen (i.e., oxygen (O), sulfur (S), selenium (Se), tellurium (Te)) containing |