US PATENT SUBCLASS 438 / 949
.~.~ Energy beam treating radiation resist on semiconductor

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

942  DF  MASKING {6}
948  DF  .~ Radiation resist {4}
949.~.~ Energy beam treating radiation resist on semiconductor

DEFINITION

Classification: 438/949

Energy beam treating radiation resist on semiconductor:

Art collection under 948 involving the use of an energy beam to irradiate a radiation sensitive layer upon a semiconductor substrate.