US PATENT SUBCLASS 438 / 87
.~.~ Graded composition
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
48
DF
MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL
{5}
57
DF
.~ Responsive to electromagnetic radiation {22}
87
.~.~ Graded composition
DEFINITION
Classification: 438/87
Graded composition:
(under subclass 57) Process for making a device responsive to electromagnetic radiation wherein the chemical composition of a semiconductor region of the substrate varies with location within the semiconductive region.