US PATENT SUBCLASS 438 / 87
.~.~ Graded composition


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

48  DF  MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5}
57  DF  .~ Responsive to electromagnetic radiation {22}
87.~.~ Graded composition


DEFINITION

Classification: 438/87

Graded composition:

(under subclass 57) Process for making a device responsive to electromagnetic radiation wherein the chemical composition of a semiconductor region of the substrate varies with location within the semiconductive region.