US PATENT SUBCLASS 438 / 793
.~.~.~.~ Organic reactant

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
778  DF  .~ Insulative material deposited upon semiconductive substrate {8}
791  DF  .~.~ Silicon nitride formation {2}
792  DF  .~.~.~ Utilizing electromagnetic or wave energy (e.g., photo-induced deposition, plasma, etc.) {1}
793.~.~.~.~ Organic reactant

DEFINITION

Classification: 438/793

Organic reactant:

(under subclass 792) Processes wherein a reactant compound utilized during the deposition of silicon nitride is an organic material (e.g., organo-siloxane, etc.).