US PATENT SUBCLASS 438 / 782
.~.~ With substrate handling during coating (e.g., immersion, spinning, etc.)

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
778  DF  .~ Insulative material deposited upon semiconductive substrate {8}
782.~.~ With substrate handling during coating (e.g., immersion, spinning, etc.)

DEFINITION

Classification: 438/782

With substrate handling during coating (e.g., immersion, spinning, etc.):

(under subclass 778) Processes wherein the semiconductor substrate is handled or manipulated in conjunction with the coating operation.