US PATENT SUBCLASS 438 / 781
.~.~.~ Subsequent heating modifying organic coating composition

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
778  DF  .~ Insulative material deposited upon semiconductive substrate {8}
780  DF  .~.~ Depositing organic material (e.g., polymer, etc.) {1}
781.~.~.~ Subsequent heating modifying organic coating composition

DEFINITION

Classification: 438/781

Subsequent heating step modifying organic coating composition:

(under subclass 780) Processes including a subsequent thermal treatment step altering the chemical composition of the organic coating composition.