US PATENT SUBCLASS 438 / 768
.~.~ Reaction with conductive region

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
765  DF  .~ By reaction with substrate {4}
768.~.~ Reaction with conductive region

DEFINITION

Classification: 438/768

Reaction with conductive region:

(under subclass 765) Processes wherein the substrate region reacting with an external agent is a conductive region or layer residing upon the semiconductor substrate.

SEE OR SEARCH CLASS

148, Metal Treatment, appropriate subclasses for methods of reactively coating (e.g., carburizing, nitriding, oxidizing, etc.) a metallic substrate.