US PATENT SUBCLASS 438 / 767
.~.~ Compound semiconductor substrate
Current as of:
June, 1999
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438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
758
DF
COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE
{6}
765
DF
.~ By reaction with substrate {4}
767
.~.~ Compound semiconductor substrate
DEFINITION
Classification: 438/767
Compound semiconductor substrate:
(under subclass 765) Processes wherein the substrate region reacting with the external agent is a compound semiconductor.