US PATENT SUBCLASS 438 / 754
.~.~ Electrically conductive material (e.g., metal, conductive oxide, etc.)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
745  DF  .~ Liquid phase etching {9}
754.~.~ Electrically conductive material (e.g., metal, conductive oxide, etc.) {1}
755  DF  .~.~.~> Silicide

DEFINITION

Classification: 438/754

Electrically conductive material (e.g., metal, conductive

oxide, etc.):

(under subclass 745) Processes wherein the material undergoing wet chemical etching is an electrically conductive material.