| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 584 | DF | COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2} |
| 597 | DF | .~ To form ohmic contact to semiconductive material {24} |
| 669 | DF | .~.~ And patterning of conductive layer {4} |
| 671 | | .~.~.~ Utilizing multilayered mask |