| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 584 | DF | COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2} |
| 597 | DF | .~ To form ohmic contact to semiconductive material {24} |
| 658 | DF | .~.~ Altering composition of conductor {1} |
| 659 | ![]() | .~.~.~ Implantation of ion into conductor |