US PATENT SUBCLASS 438 / 658
.~.~ Altering composition of conductor

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
658.~.~ Altering composition of conductor {1}
659  DF  .~.~.~> Implantation of ion into conductor

DEFINITION

Classification: 438/658

Altering composition of conductor:

(under subclass 597) Processes wherein the composition of the conductive material which forms an ohmic contact to an adjacent semiconductive region is altered (e.g., via implantation, diffusion, etc.)

(1) Note. The material serving to alter the composition of the conductive material must by supplied from other than a semiconductive region of the substrate. Formation of a silicide by reaction with a semiconductor substrate region is thus not sufficient for placement in this subclass.