US PATENT SUBCLASS 438 / 657
.~.~.~ Having electrically conductive polysilicon component

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
652  DF  .~.~ Plural layered electrode or conductor {5}
657.~.~.~ Having electrically conductive polysilicon component

DEFINITION

Classification: 438/657

Having electrically conductive polysilicon component:

(under subclass 652) Processes wherein one of the diverse conductive layers is polycrystalline silicon.