US PATENT SUBCLASS 438 / 653
.~.~.~ At least one layer forms a diffusion barrier

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
652  DF  .~.~ Plural layered electrode or conductor {5}
653.~.~.~ At least one layer forms a diffusion barrier

DEFINITION

Classification: 438/653

At least one layer forms a diffusion barrier:

(under subclass 652) Processes wherein at least one of the diverse conductive layers forms a barrier to the diffusional migration of a contact material into the semiconductor or into another contact layer.