438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
57 | DF | .~ Responsive to electromagnetic radiation {22} |
59 | DF | .~.~ Having diverse electrical device {1} |
60 | .~.~.~ Charge transfer device (e.g., CCD, etc.) |