US PATENT SUBCLASS 438 / 588
.~.~.~ Plural gate levels

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
585  DF  .~ Insulated gate formation {7}
587  DF  .~.~ Forming array of gate electrodes {1}
588.~.~.~ Plural gate levels

DEFINITION

Classification: 438/588

Plural gate levels:

(under subclass 587) Processes wherein the array of insulated gate electrodes reside on more than one level relative to the main surface of the semiconductor substrate.

SEE OR SEARCH CLASS

257, Active Solid-State Devices (e.g., Transistors, Solid-State Diodes),

250, for a charge transfer device having plural gate levels.