US PATENT SUBCLASS 438 / 58
.~.~ Gettering of substrate

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

48  DF  MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5}
57  DF  .~ Responsive to electromagnetic radiation {22}
58.~.~ Gettering of substrate

DEFINITION

Classification: 438/58

Gettering of substrate:

(under subclass 57) Process having a step of gettering the semiconductor substrate.

SEE OR SEARCH THIS CLASS, SUBCLASS:

471, for a process of gettering a semiconductor substrate per se.