US PATENT SUBCLASS 438 / 563
.~.~.~ Glassy source or doped oxide

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
558  DF  .~.~ From solid dopant source in contact with semiconductor region {6}
563.~.~.~ Glassy source or doped oxide

DEFINITION

Classification: 438/563

Glassy source or doped oxide:

(under subclass 558) Processes wherein the solid dopant source material is composed of a glass-type material or an oxide which has been doped.