| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 510 | DF | INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7} |
| 542 | DF | .~ Diffusing a dopant {15} |
| 558 | DF | .~.~ From solid dopant source in contact with semiconductor region {6} |
| 560 | | .~.~.~ Plural diffusion stages |