US PATENT SUBCLASS 438 / 552
.~.~.~ Having plural predetermined openings in master mask

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
551  DF  .~.~ Using multiple layered mask {1}
552.~.~.~ Having plural predetermined openings in master mask

DEFINITION

Classification: 438/552

Having plural predetermined openings in master mask:

(under subclass 551) Processes wherein the multiple layered diffusion mask contains a multitude of desired openings.

(1) Note. The multiple openings need not all be open at any one given step (i.e., sequential diffusion steps may utilize various openings selected from among the predetermined openings).