US PATENT SUBCLASS 438 / 541
.~.~.~ Including diffusion after fusing step

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
537  DF  .~ Fusing dopant with substrate (i.e., alloy junction) {3}
540  DF  .~.~ Including plural controlled heating or cooling steps or nonuniform heating {1}
541.~.~.~ Including diffusion after fusing step

DEFINITION

Classification: 438/541

Including diffusion after fusing step:

(under subclass 540) Processes including a step of solid-state diffusion subsequent to the alloying operation.