US PATENT SUBCLASS 438 / 540
.~.~ Including plural controlled heating or cooling steps or nonuniform heating

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
537  DF  .~ Fusing dopant with substrate (i.e., alloy junction) {3}
540.~.~ Including plural controlled heating or cooling steps or nonuniform heating {1}
541  DF  .~.~.~> Including diffusion after fusing step

DEFINITION

Classification: 438/540

Including plural controlled heating or cooling steps or nonuniform heating:

(under subclass 537) Processes including regulated multiple cooling or heating operations, or nonuniform application of thermal energy to the semiconductor substrate during the alloying operation.