| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 510 | DF | INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7} |
| 537 | ![]() | .~ Fusing dopant with substrate (i.e., alloy junction) {3} |
| 538 | DF | .~.~> Using additional material to improve wettability or flow characteristics (e.g., flux, etc.) |
| 539 | DF | .~.~> Application of pressure to material during fusion |
| 540 | DF | .~.~> Including plural controlled heating or cooling steps or nonuniform heating {1} |