438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
510 | DF | INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7} |
514 | DF | .~ Ion implantation of dopant into semiconductor region {12} |
533 | DF | .~.~ And contact formation (i.e., metallization) {1} |
534 | .~.~.~ Rectifying contact (i.e., Schottky contact) |