US PATENT SUBCLASS 438 / 533
.~.~ And contact formation (i.e., metallization)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
514  DF  .~ Ion implantation of dopant into semiconductor region {12}
533.~.~ And contact formation (i.e., metallization) {1}
534  DF  .~.~.~> Rectifying contact (i.e., Schottky contact)

DEFINITION

Classification: 438/533

And contact formation (i.e., metallization):

(under subclass 514) Process including a step of forming an electrical contact to a semiconductor region of the substrate.