US PATENT SUBCLASS 438 / 523
.~.~.~ And contact formation (i.e., metallization)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
514  DF  .~ Ion implantation of dopant into semiconductor region {12}
518  DF  .~.~ Of compound semiconductor {3}
523.~.~.~ And contact formation (i.e., metallization)

DEFINITION

Classification: 438/523

And contact formation (i.e., metallization):

(under subclass 518) Process including a step of making an electrical contact to a compound semiconductor region of the substrate.