US PATENT SUBCLASS 438 / 522
.~.~.~ Including heat treatment

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
514  DF  .~ Ion implantation of dopant into semiconductor region {12}
518  DF  .~.~ Of compound semiconductor {3}
522.~.~.~ Including heat treatment

DEFINITION

Classification: 438/522

Including heat treatment:

(under subclass 518) Process including a step of heat treating the substrate having compound semiconductive regions.

SEE OR SEARCH THIS CLASS, SUBCLASS:

542, for a per se process of diffusing (i.e., driving-in) a dopant into semiconductive regions of the substrate via a heat treatment step.