US PATENT SUBCLASS 438 / 498
.~.~ Differential etching

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

478  DF  FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9}
497  DF  .~ Fluid growth from liquid combined with preceding diverse operation {2}
498.~.~ Differential etching

DEFINITION

Classification: 438/498

Differential etching:

(under subclass 497) Process wherein the differential etching of the substrate prior to the fluid growth of semiconductive material from the liquid state is the diverse step.