| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 478 | DF | FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9} |
| 497 | ![]() | .~ Fluid growth from liquid combined with preceding diverse operation {2} |
| 498 | DF | .~.~> Differential etching |
| 499 | DF | .~.~> Doping of semiconductor |