438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
478 | DF | FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9} |
497 | .~ Fluid growth from liquid combined with preceding diverse operation {2} | |
498 | DF | .~.~> Differential etching |
499 | DF | .~.~> Doping of semiconductor |