US PATENT SUBCLASS 438 / 491
.~.~ And subsequent doping of polycrystalline semiconductor

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

478  DF  FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9}
488  DF  .~ Polycrystalline semiconductor {3}
491.~.~ And subsequent doping of polycrystalline semiconductor

DEFINITION

Classification: 438/491

And subsequent doping of polycrystalline semiconductor:

(under subclass 488) Process having a subsequent step of incorporating an electrically active dopant species into the polycrystalline semiconductive material.