| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 478 | DF | FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9} |
| 479 | DF | .~ On insulating substrate or layer {2} |
| 480 | ![]() | .~.~ Including implantation of ion which reacts with semiconductor substrate to form insulating layer |