US PATENT SUBCLASS 438 / 453
.~.~ And electrical conductor formation (i.e., metallization)


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
439  DF  .~ Recessed oxide by localized oxidation (i.e., LOCOS) {9}
453.~.~ And electrical conductor formation (i.e., metallization)


DEFINITION

Classification: 438/453

And electrical conductor formation (i.e., metallization):

(under subclass 439) Process including a step of making an electrically conductive member integral to the semiconductive substrate.

(1) Note. The contact may be, for example, directly to semiconductive regions of the substrate or may reside atop the field oxide isolation structure.

SEE OR SEARCH THIS CLASS, SUBCLASS:

584, for a process of depositing electrically or thermally conductive material on a semiconductor substrate.