US PATENT SUBCLASS 438 / 443
.~.~ Etchback of recessed oxide

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
439  DF  .~ Recessed oxide by localized oxidation (i.e., LOCOS) {9}
443.~.~ Etchback of recessed oxide

DEFINITION

Classification: 438/443

Etchback of recessed oxide:

(under subclass 439) Process having a step of thinning the

formed recessed oxide by chemical etching action followed by an additional step of oxidizing a semiconductive region of the substrate.