US PATENT SUBCLASS 438 / 441
.~.~ With electrolytic treatment step

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
439  DF  .~ Recessed oxide by localized oxidation (i.e., LOCOS) {9}
441.~.~ With electrolytic treatment step

DEFINITION

Classification: 438/441

With electrolytic treatment step:

(under subclass 439) Process including a step of electrochemical treatment of the semiconductor substrate (e.g., such as to affect etching or coating action thereon).