US PATENT SUBCLASS 438 / 413
.~.~ With epitaxial semiconductor formation
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
400
DF
FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE
{10}
404
DF
.~ Total dielectric isolation {7}
413
.~.~ With epitaxial semiconductor formation
DEFINITION
Classification: 438/413
With epitaxial semiconductor formation:
(under subclass 404) Process for making a total dielectric isolation semiconductor structure having a step of epitaxially depositing a semiconductive layer onto the substrate.