US PATENT SUBCLASS 438 / 396
.~ Stacked capacitor

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

381  DF  MAKING PASSIVE DEVICE (E.G., RESISTOR, CAPACITOR, ETC.) {4}
396.~ Stacked capacitor {3}
397  DF  .~.~> Including selectively removing material to undercut and expose storage node layer
398  DF  .~.~> Including texturizing storage node layer
399  DF  .~.~> Having contacts formed by selective growth or deposition

DEFINITION

Classification: 438/396

Stacked capacitor:

(under subclass 386) Process for making a capacitor containing a number of capacitor plate and dielectric layers deposited successively one atop another.