| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
| 312 | DF | .~ Having heterojunction {7} |
| 318 | DF | .~.~ Including isolation structure {1} |
| 319 | ![]() | .~.~.~ Air isolation (e.g., mesa, etc.) |