438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
22 | DF | MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12} |
29 | DF | .~ Including integrally formed optical element (e.g., reflective layer, luminescent material, contoured surface, etc.) {3} |
31 | .~.~ Optical waveguide structure |