438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
22 | DF | MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12} |
29 | .~ Including integrally formed optical element (e.g., reflective layer, luminescent material, contoured surface, etc.) {3} | |
30 | DF | .~.~> Liquid crystal component |
31 | DF | .~.~> Optical waveguide structure |
32 | DF | .~.~> Optical grating structure |