| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 22 | DF | MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12} |
| 29 | ![]() | .~ Including integrally formed optical element (e.g., reflective layer, luminescent material, contoured surface, etc.) {3} |
| 30 | DF | .~.~> Liquid crystal component |
| 31 | DF | .~.~> Optical waveguide structure |
| 32 | DF | .~.~> Optical grating structure |