| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 22 | DF | MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12} |
| 23 | DF | .~ Having diverse electrical device {1} |
| 24 | DF | .~.~ Including device responsive to nonelectrical signal {1} |
| 25 | ![]() | .~.~.~ Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor |