438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
22 | DF | MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12} |
23 | DF | .~ Having diverse electrical device {1} |
24 | .~.~ Including device responsive to nonelectrical signal {1} | |
25 | DF | .~.~.~> Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor |