438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
14 | WITH MEASURING OR TESTING {3} | |
15 | DF | .~> Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor |
16 | DF | .~> Optical characteristic sensed |
17 | DF | .~> Electrical characteristic sensed {1} |