(under subclass 14) Process wherein the sensed condition is an electrical characteristic of the process or of the device made thereby.
SEE OR SEARCH CLASS
324, Electricity: Measuring and Testing, for per se electrical measuring, especially
71.5, for determining a nonelectrical property of a semiconductor by measuring an electrical property, subclass 451 for determining a material property using thermoelectric phenomenon, subclasses 500+ for fault detecting in electrical circuits and of electrical components, and subclass 719 for semiconductor materials quality determination using conductivity effects.
