438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
106 | DF | PACKAGING (E.G., WITH MOUNTING, ENCAPSULATING, ETC.) OR TREATMENT OF PACKAGED SEMICONDUCTOR {10} |
110 | DF | .~ Making plural separate devices {2} |
113 | DF | .~.~ Substrate dicing {1} |
114 | .~.~.~ Utilizing a coating to perfect the dicing |