US PATENT SUBCLASS 438 / 10
.~ Electrical characteristic sensed

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

5  DF  INCLUDING CONTROL RESPONSIVE TO SENSED CONDITION {3}
10.~ Electrical characteristic sensed {3}
11  DF  .~.~> Utilizing integral test element
12  DF  .~.~> And removal of defect
13  DF  .~.~> Altering electrical property by material removal

DEFINITION

Classification: 438/10

Electrical characteristic sensed:

(under subclass 5) Process wherein the sensed condition is an electrical property of the device or an electrical property of the process.

SEE OR SEARCH CLASS

209, Classifying, Separating, and Assorting Solids, especially

571+, for methods of electrical testing thereby sensing a property of an item to facilitate subsequent separation.