US PATENT SUBCLASS 438 / 13
.~.~ Altering electrical property by material removal

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

5  DF  INCLUDING CONTROL RESPONSIVE TO SENSED CONDITION {3}
10  DF  .~ Electrical characteristic sensed {3}
13.~.~ Altering electrical property by material removal

DEFINITION

Classification: 438/13

Altering electrical property by material removal:

(under subclass 10) Process whereby following or as a result of the electrical sensing step, an electrical property of the semiconductor substrate is altered by a material removal step (e.g., by etching).