(under subclass 10) Process wherein the electrical property is sensed utilizing a specific test structure integral to the semiconductor substrate and which has no other function in the completed device.
SEE OR SEARCH CLASS
257, Active Solid-State Devices (e.g., Transistors, Solid-State Diodes),
48, for test or calibration structures provided on active solid-state devices to permit or facilitate the measurement, test, or calibration of the characteristics of the devices.
